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EUV \u5149\u7f69\u76d2<\/h4>\n

\u516c\u53f8\u5728\u5e74\u5831\u4e2d\u8868\u793a\uff0c\u9ad8\u968e\u5149\u7f69\u50b3\u8f09\u5728\u570b\u5167\u5916\u90fd\u5c45\u9818\u5c0e\u5730\u4f4d\uff0c\u9ad8\u968e\u88fd\u7a0b\u7684\u6295\u8cc7\u6210\u9577\u6703\u512a\u65bc\u6574\u9ad4\u534a\u5c0e\u9ad4\uff0c2025 \u5e74\u5408\u4f75\u71df\u6536 73.47 \u5104\u5143\u3002\u767c\u8a00\u4eba\u6731\u4f73\u7433\u5728 2026 \u5e74 3 \u6708\u8868\u793a\uff0c\u5927\u5ba2\u6236 2 \u5948\u7c73\u91cf\u7522\u5e36\u52d5 EUV \u5149\u7f69\u76d2\u8207 FOUP \u51fa\u8ca8\uff0c\u7a3c\u52d5\u7387\u5275\u65b0\u9ad8\uff1b\u516c\u53f8 8 \u6708\u9810\u4f30 2026 \u5e74 EUV \u5149\u7f69\u76d2\u51fa\u8ca8\u91cf\u5e74\u589e\u6709\u671b\u8d85\u904e 50%\uff0c7 \u6708\u4e5f\u63d0\u5230\u7f8e\u570b\u534a\u5c0e\u9ad4\u88fd\u9020\u56de\u6d41\u5e36\u52d5 EUV \u5149\u7f69\u76d2\u51fa\u8ca8\u5927\u5e45\u6500\u5347\u300211 \u6708\u516c\u53f8\u8868\u793a\u7b2c\u56db\u5b63\u7522\u80fd\u6eff\u8f09\u3001\u8a02\u55ae\u80fd\u898b\u5ea6\u5df2\u5230 2027 \u5e74\uff0c\u6b63\u5168\u529b\u5099\u8ca8\u4e26\u898f\u5283\u7522\u80fd\u64f4\u5145\uff1b\u53e6\u81ea 2023 \u5e74\u8d77\u7814\u767c 12 \u540b EUV \u5149\u7f69\u8f09\u5177\uff0c\u5c07\u63a8\u52d5\u529f\u80fd\u6e2c\u8a66\u8207\u5ba2\u6236\u9a57\u8b49\uff0c\u5c0d\u61c9\u696d\u754c\u5c0e\u5165 High-NA EUV \u7684\u898f\u5283\u30022026 \u5e74 1\uff5e10 \u6708\u71df\u6536 77 \u5104\u5143\u3001\u5e74\u589e 34%\u3002<\/p>\n

FOUP \u5e02\u5360\u64f4\u5f35<\/h4>\n

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\u5148\u9032\u5c01\u88dd\u8f09\u5177\u8207\u6d77\u5916\u7522\u80fd<\/h4>\n

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\u5916\u90e8\u6a5f\u69cb\u89c0\u9ede<\/h4>\n

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\u5e02\u5834\u95dc\u6ce8\u7684\u8b8a\u6578<\/h4>\n

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\u5df2\u516c\u5e03\u7684\u5be6\u7e3e\uff1a2026 \u5e74\u4e0a\u534a\u5e74\u5408\u4f75\u71df\u6536 41.80 \u5104\u5143\u3001\u5e74\u589e 22.3%\uff0c\u6bcf\u80a1\u76c8\u9918 8.04 \u5143\u3001\u8f03\u53bb\u5e74\u540c\u671f\u7684 2.64 \u5143\u6210\u9577 204.5%\uff1b\u7b2c 2 \u5b63\u55ae\u5b63\u71df\u6536 23.15 \u5104\u5143\u3001\u6bcf\u80a1\u76c8\u9918 5.46 \u5143\uff0c\u53bb\u5e74\u540c\u671f\u70ba 17.10 \u5104\u5143\u8207 0.44 \u5143\u3002\u4e0a\u534a\u5e74\u6bdb\u5229\u7387 43.2%\uff0c\u9ad8\u65bc 2025 \u5e74\u5168\u5e74\u7684 41.9%\u3002<\/p>\n

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